01 반도체 테스트의 이해 01. 반도체 후공정 ······················································ 5 02. 테스트의 종류······················································ 8 03. 웨이퍼 테스트 ···················································· 10 EPM ································································ 13 웨이퍼 번인······················································· 13 테스트 ····························································· 14 리페어······························································ 15 04. 패키지 테스트 ···················································· 16 TDBI································································ 17 테스트 ····························································· 18 외관 검사·························································· 18 02 반도체 패키지의 정의와 역할 01. 반도체 패키지의 정의········································· 25 02. 반도체 패키지의 역할 ········································ 26 03. 반도체 패키지의 개발 트렌드····························· 28 04. 반도체 패키지 개발 과정 ··································· 31 03 반도체 패키지의 종류 01. 반도체 패키지의 분류······················································ 39 02. 컨벤셔널 패키지·······························································41 플라스틱 패키지 - 리드프레임 타입 패키지··························41 플라스틱 패키지 - 서브스트레이트 타입 패키지 ·················· 43 세라믹 패키지 ································································ 46 03. 웨이퍼 레벨 패키지························································· 47 웨이퍼 레벨 패키지 ························································· 47 재배선··········································································· 56 플립 칩·········································································· 58 04. 적층 패키지····································································· 66 패키지 적층 ··································································· 67 칩 적층 - Chip Stack with Wire Bonding··························· 70 실리콘 관통 전극 - Chip Stack with TSV ··························· 73 05. 시스템 인 패키지····························································· 86 04 반도체 패키지 설계와 해석 01. 반도체 패키지 설계 ························································· 97 02. 구조 해석······································································· 101 휨 해석········································································ 104 솔더 접합부 신뢰성 ······················································· 106 강도 해석····································································· 108 03. 열 해석 ·········································································· 109 04. 전기 해석 ······································································113 05 반도체 패키지 공정 01. 컨벤셔널 패키지 공정·······································123 백 그라인딩 ····················································124 웨이퍼 절단·····················································127 다이 어태치 ····················································131 인터커넥션······················································137 몰딩·······························································143 마킹·······························································144 트리밍 - 리드프레임·········································146 솔더 도금 - 리드프레임·····································147 성형 - 리드프레임············································147 솔더 볼 마운팅 - 서브스트레이트 ·······················148 싱귤레이션 - 서브스트레이트 ····························152 02. 웨이퍼 레벨 패키지 공정··································153 포토 공정 ·······················································156 스퍼터링 공정 ················································· 161 전해도금 공정 ·················································163 습식 공정 - PR 스트립과 금속 에칭 ····················166 팬인 WLCSP 공정············································167 솔더 볼 마운팅 공정·········································168 플립 칩 범프 공정 ············································169 재배선 공정 ····················································171 팬아웃 WLCSP 공정·········································172 실리콘 관통 전극 패키지 공정···························· 174 03. 검사와 측정······················································187 검사·······························································187 측정·······························································192 06 반도체 패키지 재료 01. 컨벤셔널 패키지 재료···················································· 208 리드프레임 ·································································· 208 서브스트레이트···························································· 210 접착제········································································· 217 에폭시 몰딩 컴파운드···················································· 222 솔더 ··········································································· 225 테이프········································································· 228 와이어 ········································································ 229 포장 재료 ···································································· 230 02. 웨이퍼 레벨 패키지 재료··············································· 231 포토 레지스트 ······························································ 231 도금 용액····································································· 234 PR 스트립퍼································································· 235 에천트········································································· 237 스퍼터 타깃 ································································· 238 언더필········································································· 238 캐리어와 접착제, 마운팅 테이프······································ 240 07 반도체 패키지 신뢰성 01. 신뢰성 의미 ··································································· 247 02. JEDEC 기준··································································· 248 03. 수명 신뢰성 시험··························································· 253 EFR ············································································ 253 HTOL ········································································· 254 LTOL ·········································································· 255 HTSL ·········································································· 256 LTSL··········································································· 257 Endurance ····················································· 257 Data Retention··············································· 258 04. 환경 신뢰성 시험·············································· 259 Preconditioning·············································· 259 TC ································································· 263 TS ································································· 268 THS······························································· 268 PCTP······························································269 UHAST ·························································· 270 HAST····························································· 271 HALT····························································· 272 05. 기계적 신뢰성 시험·········································· 273 충격································································274 진동······························································· 275 구부림 ··························································· 275 비틀림·····························································276 08 반도체 용어해설 용어해설·································································· 282